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Atomic Layer Deposition

Veeco is the leading ALD supplier to academic institutions and industrial customers worldwide, with over 530 ALD systems shipped for R&D and production.

The Savannah® Thermal and Fiji® Plasma systems are the ALD platforms of choice for R&D and have been cited in more than 2,000 peer-reviewed academic papers.

For fully automated industrial solutions for high-volume manufacturing (HVM) ALD combine lowest cost-of-ownership, superior throughput, and the highest standards of quality, the new Firebird™ HVM and proven Phoenix® platform is tailored to meet specific customer needs in terms of ALD process performance, wafer handling and throughput as well as flexible thermal management.

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