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Platinum Coater

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The LUXORPt is a highly innovative, fully automated sputtering device which applies a fine grain platinum or gold coating from 1 to 100 nm thickness.

LUXOR’s unique A² technology assures that the gold or platinum is sprayed in a highly controlled and precise manner, resulting in an extremely uniform, thin and homogeneous coating.

This allows your scanning electron microscope to show the best possible image quality.

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Chris Bradburn

Chris

Technical specification

System:

  • Pt or Au coating with air or argon
  • Maximum capacity: 7 x Ø 12.5 mm or 3 x Ø 25 mm stubs
  • Average coating time: 4 – 5 minutes (based on resp. 2 nm or 4 nm platinum coating)
  • Average coating time: 5 minutes (based on a 10 nm gold coating)
  • Vacuum & drying modes
  • Low energy dual stage pump
  • Vacuum & drying modes: 7 Pa to 150 Pa (continuously selectable)
  • Au/Pt layer thickness: 1 to 100 nm (continuously selectable)
  • Process time: 1 to 600 minutes (continuously selectable)
  • Process chamber: Borosilicate glass Ø 100 mm x 150 mm height
  • Implosion shield: PET Ø 120 mm x 150 mm height
  • Vacuum connector: DN 16 KF
  • Gas supply: Air or argon (0,6 bar)
  • Dimensions: 340 x 340 x 290 (mm, W x D x H)
  • Weight: 12,5 kg

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