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TFA L59

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The Linseis TFA L59 is a compact, fully integrated measurement platform designed for the precise characterization of thin film materials. Tailored for modern research and development needs, this easy-to-use system provides fast and accurate evaluation of essential physical properties where surface and interface effects play a dominant role.

Why Thin Films?

Thin films exhibit significantly different properties compared to their bulk counterparts due to parasitic surface effects, reduced dimensionality, and high aspect ratios. These effects are critical in semiconductors, thermoelectrics, and nanotechnology, where performance often hinges on thin film behavior.

Measured Properties:

  • Thermal Conductivity
  • Electrical Resistivity
  • Seebeck Coefficient
  • Hall Mobility
  • Charge Carrier Concentration

Key Advantages:

  • Highly Integrated Design – Minimal setup time, maximum efficiency
  • User-Friendly Interface – Optimized for intuitive operation
  • High Accuracy & Speed – Rapid measurements with scientific-grade precision
  • Advanced Thin Film Capability – Purpose-built for nanoscale and micro-scale material systems

Datablad

Kategorier

Chris Bradburn

Chris

Teknisk spesifikasjon

MODEL TFA L59 – THIN FILM ANALYZER
Temperature range: RT to 280°C
-160°C to 280°C
Sample thickness: From 5 nm to 25 µm (depending on sample)
Measuring principle: Chip-based (pre-structured measuring chips, 24 pieces per box)
Separation techniques: Among others: PVD (sputtering, vaporisation), ALD, spin coating, ink-jet printing and many more
Measured parameters: Thermal conductivity (3 Omega)
Heat capacity
Optional: Electrical conductivity / specific resistance
Hall constant / mobility / charge carrier density
(electromagnet up to 1 T or permanent magnet with 0.5 T)
Vacuum: ~10E-4mbar
Electronics: Integrated
Interface: USB
Measuring range
Thermal conductivity: 0.05 to 200 W/m∙K
3 Omega method, hot-strip method (in-plane measurement)
Electrical conductivity: 0.05 to 1 ∙ 106 S/cm
Van der Pauw four-probe measurement
Seebeck coefficient: 5 to 2500 μV/K
Repeatability & Accuracy
Thermal conductivity: ± 3% (for most materials)
± 10% (for most materials)
Resistivity: ± 3% (for most materials)
± 6% (for most materials)
Seebeck coefficient: ± 5% (for most materials)
± 7% (for most materials)

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